Data of "Development and Characterization of a Chemically Amplified Positive-Tone Hybrid Resist for Thick-Film Microfabrication"
| Identifier | |
|---|---|
| DOI | https://doi.org/10.57745/BPUVOK |
| Metadata Access | https://entrepot.recherche.data.gouv.fr/oai?verb=GetRecord&metadataPrefix=oai_datacite&identifier=doi:10.57745/BPUVOK |
| Provenance | |
|---|---|
| Creator | ETIENNE, Pascal  |
| Publisher | Recherche Data Gouv |
| Contributor | ETIENNE, Pascal; Université de Montpellier; Entrepôt Recherche Data Gouv |
| Publication Year | 2026 |
| Funding Reference | Région Occitanie et Université de Montpellier |
| Rights | etalab 2.0; info:eu-repo/semantics/openAccess; https://spdx.org/licenses/etalab-2.0.html |
| OpenAccess | true |
| Contact | ETIENNE, Pascal (L2C) |
| Representation | |
|---|---|
| Resource Type | Dataset |
| Format | text/tab-separated-values; text/plain |
| Size | 7073; 711 |
| Version | 1.0 |
| Discipline | Chemistry; Physics |