This repository contains research data regarding material redeposition during ultrashort pulse laser micromachining of TMPTA films and burst pulse polishing of the same. The resarch was conducted using the Design of Experiments methodology. Details to the designing process of the experiments, their execution and their evaluation following this methodology are contained in this repository. Additionally, raw data roughness measurements after ultrashort pulse micromachining of TMPTA films below and above the sample, as well as after polishing using burst pulses with different parameter combinations are contained.

The research leading to these results recieved funding from Focused Energy GmbH, the European Regional Development Fund, and the state of Hesse.