Replication Data for: Scalable production of solid-immersion lenses for quantum emitters in silicon carbide


Data to replicate the experimental data plots in the paper: Fig. 1d, e: AFM scans of SIL before the etching and after the etching, possibility to see how the mask changed in the etching process; Fig. 2a, b, c: Confoscal scan of the all SIL, g2 measurements of one defect inside the sils and relative ODMR measurements related to Vsi in SiC in the SIL; Fig. 3a, b: statistics of centers inside the sils according to the enhancement, maximum enhancement reached for one center inside the SIL compared to the one outside

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Metadata Access
Creator Sardi, Fiammetta (Universität Stuttgart)
Publisher DaRUS
Contributor Kolesov, Roman
Publication Year 2021
Funding Reference DFG, KO4999 3 1; European Commission, eu repo grantAgreement EC H2020 742610; European Commission, eu repo grantAgreement EC H2020 820445; European Commission, eu repo grantAgreement EC H2020 820391
Rights CC BY 4.0; info:eu-repo/semantics/openAccess;
OpenAccess true
Contact Kolesov, Roman (Universität Stuttgart)
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Format text/x-fixed-field; text/plain; text/tab-separated-values
Size 4821; 5080; 595073; 26185; 1413; 880; 687
Version 1.0
Discipline Natural Sciences; Physics