Microfabrication Approaches on Magnetic Shape Memory Films

DOI

This dataset contains all data used for the publication of the paper " Microfabrication Approaches on Magnetic Shape Memory Films ". The purpose of this research was to test different microfabrication approaches to fabricate patterned structures from epitaxial magnetic shape memory films and then partially release them from the substrate. The research was performed under a BAM-IFW tandem project.

Identifier
DOI https://doi.org/10.22000/1629
Metadata Access https://www.radar-service.eu/oai/OAIHandler?verb=GetRecord&metadataPrefix=datacite&identifier=10.22000/1629
Provenance
Creator Leibniz Institute for Solid State and Materials Research; Kar, Satyakam ORCID logo
Publisher Leibniz Institute for Solid State and Materials Research
Contributor RADAR
Publication Year 2023
Funding Reference Leibniz Institute for Solid State and Materials Research https://ror.org/04zb59n70 ROR
Rights Open Access; Creative Commons Attribution Non Commercial 4.0 International; info:eu-repo/semantics/openAccess; https://creativecommons.org/licenses/by-nc/4.0/legalcode
OpenAccess true
Representation
Language English
Resource Type Dataset
Format application/x-tar
Discipline Construction Engineering and Architecture; Engineering; Engineering Sciences; Materials Science; Materials Science and Engineering; Natural Sciences; Physics
Temporal Coverage 2021-2023