Data publication: Integration of Multifunctional Epitaxial (Magnetic) Shape Memory Films in Silicon Microtechnology
| Identifier | |
|---|---|
| DOI | https://doi.org/10.14278/rodare.2293 |
| Related Identifier | https://www.hzdr.de/publications/Publ-36937 |
| Related Identifier | https://www.hzdr.de/publications/Publ-37186 |
| Related Identifier | https://doi.org/10.14278/rodare.2292 |
| Related Identifier | https://rodare.hzdr.de/communities/fwi |
| Related Identifier | https://rodare.hzdr.de/communities/hzdr |
| Related Identifier | https://rodare.hzdr.de/communities/matter |
| Related Identifier | https://rodare.hzdr.de/communities/rodare |
| Metadata Access | https://rodare.hzdr.de/oai2d?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:rodare.hzdr.de:2293 |
| Provenance | |
|---|---|
| Creator | Fink, Lukas  ; Kar, Satyakam ; Lünser, Klara ; Nielsch, Kornelius ; Reith, Heiko ; Fähler, Sebastian |
| Publisher | Rodare |
| Publication Year | 2023 |
| Rights | Creative Commons Attribution 4.0 International; Open Access; https://creativecommons.org/licenses/by/4.0/legalcode; info:eu-repo/semantics/openAccess |
| OpenAccess | true |
| Contact | https://rodare.hzdr.de/support |
| Representation | |
|---|---|
| Language | English |
| Resource Type | Dataset |
| Discipline | Life Sciences; Natural Sciences; Engineering Sciences |