6D strain microscopy of Ge/SiGe parabolic quantum wells on complex virtual substrates

DOI

We will use six-dimensional (6D) dark-field X-ray microscopy (DFXM) at the new beamline ID03 to obtain a detailed view of the strain landscape in parabolic Ge/Si1-xGex quantum wells (pQWs) deposited on GeSi virtual substrates for applications in micro- and optoelectronics. In particular, volumetric mapping of the full strain tensor in these alloyed multilayers with fine spatial resolution will be demonstrated. This data will allow refinement of our Finite Element Method (FEM) models to predict device performance and provide a fundamental understanding of plastic relaxation mechanisms in complex epitaxial heterostructures.

Identifier
DOI https://doi.org/10.15151/ESRF-ES-2119588632
Metadata Access https://icatplus.esrf.fr/oaipmh/request?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:icatplus.esrf.fr:inv/2119588632
Provenance
Creator Enrico TALAMAS SIMOLA ORCID logo; Cedric CORLEY-WICIAK ORCID logo; Carsten Detlefs ORCID logo; AGNIESZKA CORLEY-WICIAK ORCID logo; Fabrizio ROVARIS ORCID logo; Elena CAMPAGNA ORCID logo; Yaozhu LI (ORCID: 0000-0002-9092-659X); Giovanni CAPELLINI ORCID logo
Publisher ESRF (European Synchrotron Radiation Facility)
Publication Year 2028
Rights CC-BY-4.0; https://creativecommons.org/licenses/by/4.0
OpenAccess true
Representation
Resource Type Data from large facility measurement; Collection
Discipline Particles, Nuclei and Fields