In this study, we investigate the ion-induced phase transition in gallium oxide (Ga2O3) from beta- to the gamma- phase and the role of defects in the transformation and the quality of the resulting crystal structure. This upload contains XRD, TEM, RBS, PALS, DB-VEPAS and simulations.

We acknowledge the M-ERA.NET Program for financial support via the GOFIB project supported by the tax funds on the basis of the budget passed by the Saxonian state parliament in Germany and administrated in Finland by the Academy of Finland project number 352518. UB, GH, and NK acknowledge support by the COST Action CA19140 FIT4NANO. This work was partially supported by the Initiative and Networking Fund of the Helmholtz Association (FKZ VH-VI-442 Memriox) and the Helmholtz Energy Materials Characterization Platform (03ET7015). We are grateful for CSC-Finnish IT Center for Science for generous computational resources.