Data publication: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications
| Identifier | |
|---|---|
| DOI | https://doi.org/10.14278/rodare.1805 |
| Related Identifier | Cites https://doi.org/10.17815/jlsrf-3-159 |
| Related Identifier | IsReferencedBy https://doi.org/10.1088/1361-6641/acbe5d |
| Related Identifier | IsIdenticalTo https://www.hzdr.de/publications/Publ-34906 |
| Related Identifier | IsReferencedBy https://www.hzdr.de/publications/Publ-34842 |
| Related Identifier | IsPartOf https://doi.org/10.14278/rodare.1804 |
| Related Identifier | IsPartOf https://rodare.hzdr.de/communities/fwi |
| Related Identifier | IsPartOf https://rodare.hzdr.de/communities/ibc |
| Related Identifier | IsPartOf https://rodare.hzdr.de/communities/rodare |
| Metadata Access | https://rodare.hzdr.de/oai2d?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:rodare.hzdr.de:1805 |
| Provenance | |
|---|---|
| Creator | von Borany, Johannes; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz  ; Hlawacek, Gregor (ORCID: 0000-0001-7192-716X); Hübner, René ; Klüpfel, Fabian; Möller, Wolfhard ; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Tiron, Raluca |
| Publisher | Rodare |
| Publication Year | 2022 |
| Rights | Creative Commons Attribution 4.0 International; Open Access; https://creativecommons.org/licenses/by/4.0/legalcode; info:eu-repo/semantics/openAccess |
| OpenAccess | true |
| Contact | https://rodare.hzdr.de/support |
| Representation | |
|---|---|
| Resource Type | Dataset |
| Discipline | Life Sciences; Natural Sciences; Engineering Sciences |