This dataset contains the optical images obtained on MIM structures after inducing multiple Dielectric Breakdowns (BD) of the gate stack. The images were taken under different conditions, in order to evaluate the suitability of the post-BD images as entropy source for the implementation of Physical Unclonable Functions (PUF) in security applications. In total, 9 devices were measured, under each of the conditions. The dataset corresponds to the set of images obtained without any type of processing.

METHODOLOGICAL INFORMATION

1. The dataset corresponds to the optical images obtained on MIM structures after multiple dielectric breakdown events of the gate stack. The analyzed devices are MIM structures with an active area of 500 μm x 500 μm and with Pt as electrodes and HfO2 (30nm thick, grown by Atomic Layer Deposition, ALD) as gate oxide. The MIM capacitors were manufactured on a thick SiO2 layer grown onto a Si substrate. The BD events have been induced using a wafer probe station and a Semiconductor Paramater Analyzer (keithley 4200A-SCS), under a constant voltage stress of -12V during 60s. The optical images were obtained with two optical systems. The first one (optical system 1) is an optical Microscope Nikon ECLIPSE LV150N with Bright or Dark Field equipped with long working distance objectives 10X and with and integrated 5 megapixels Moticam CMOS camera. Optical system 2 consisted of a low cost optical Microscope (Swift SW100), Dark Field (with a magnification of 10x10) plus a mobile phone to register the images. In particular, the images were registered with a standard Samsung Galaxy A50 with 3024x4032 pixels resolution. The images were taken with a digital zoom of 3.1. The post-BD images were measured under 16 different conditions.

2. Methods for processing the data: Data has not been processed.

3. Instrument- or software- specific information needed to interpret the data: Software necessary to open jpg files.

4. Instruments, calibration and standards information: keithley 4200A-SCS to induce the breakdown of the devices and Optical Microscopes described above to obtain the images.

5. Environmental or experimental conditions: The measurements were done in ambient conditions, under different illuminations.