Determination of defects nature and density from Laue patterns and XEOL on GaN materials.

DOI

We propose a disruptive approach based on μLaue diffraction to study the nature and the distribution statistics of defects in semiconductor materials. The fine structure of the g peaks of Laue patterns are modified by the presence of defects according to the g.b criterion used in e- microscopy to determine the b Burgers’s vectors of dislocations. Here we propose to finely analyze and map the shape of the Laue peaks (corresponding to hkl planes) under the polychromatic beam footprint. The sorting of the peak’s distortions/elongations will provide the nature of the defects (extinction criteria) as well as the density of the defects (amplitude/intensity of the broadening). The collection of hkl peaks images obtained during mapping will be processed by AI methods (variational auto encoders, VAE) to get a fast and concise analysis. This will be compared to simulations of Laue patterns for simple defects (screw/edge components). This method will be demonstrated on several GaN materials.

Identifier
DOI https://doi.org/10.15151/ESRF-ES-2061624872
Metadata Access https://icatplus.esrf.fr/oaipmh/request?verb=GetRecord&metadataPrefix=oai_datacite&identifier=oai:icatplus.esrf.fr:inv/2061624872
Provenance
Creator BEATRIZ DE GOES FOSCHIANI ORCID logo; JOEL EYMERY ORCID logo; Jean-Sebastien MICHA; SERGIO BONGIORNO; Olivier ULRICH
Publisher ESRF (European Synchrotron Radiation Facility)
Publication Year 2028
Rights CC-BY-4.0; https://creativecommons.org/licenses/by/4.0
OpenAccess true
Representation
Resource Type Data from large facility measurement; Collection
Discipline Particles, Nuclei and Fields