Optimization of reactively sputtered Mn$_3$GaN films based on resistivity measurements

DOI

Data of 5 figures as separate sheets in one MS_Excel file

Identifier
DOI https://doi.org/10.35097/CEmxypAUUQgfFBKS
Metadata Access https://www.radar-service.eu/oai/OAIHandler?verb=GetRecord&metadataPrefix=datacite&identifier=10.35097/CEmxypAUUQgfFBKS
Provenance
Creator Sürgers, Christoph ORCID logo; Fischer, Gerda; Deng, Sihao; Hu, Dongmei; Wang, Cong
Publisher Karlsruhe Institute of Technology
Contributor RADAR
Publication Year 2024
Rights Open Access; Creative Commons Attribution 4.0 International; info:eu-repo/semantics/openAccess; https://creativecommons.org/licenses/by/4.0/legalcode
OpenAccess true
Representation
Resource Type Dataset
Format application/x-tar
Discipline Natural Sciences; Physics