This dataset belongs to the paper "Solving the puzzle of hierarchical martensitic microstructures in NiTi by (111)-oriented epitaxial films" and contains all raw data used for the paper. It includes SEM, TEM, Texture measurements and inverse polfigures. It also contains the MATLAB code for calculating variant orientations, twin boundary and habit plane orientations, and inverse pole figures. Information about sample, measurement techniques and further data description can be found in README.txt.