-
Back-Side SEM Images and Respective Modified GDSII Chip Designs
This data set consists of backside scanning electron microscope (SEM) images of four different CMOS integrated circuits (90nm, 65nm, 40nm and 28nm technologies) recorded for... -
A Real-World Metal-Layer SEM Image Dataset with Partial Labels
This dataset contains scanning electron microscope (SEM) images and labels from our paper "Towards Unsupervised SEM Image Segmentation for IC Layout Extraction", which are...
