The TEM samples were mounted on a pure-Cu sample holder, implanted perpendicularly into the surface with 30 keV helium ion of a dose of 1 × 1017 He+/cm2 at a room temperature . The helium ions content in the sample was estimated by the Monte Carlo program SRIM 2013 shown in Figure.1. Some impurity particles were observed inside the grain before the irradiation as shown in Figure 2 , and then that were analyzed the composition as shown in Figure 3 . After helium ion irradiation, a large number of dislocation loops were appeared in the specimens and then analyzed and counted, which were shown in Figure 4 and Figure 5. The irradiation-induced bubbles were imaged with under-focus image conditions with Δf = -6 um as shown in Figure 6, with bubble size distribution shown in Figure 7. The irradiation temperature as a reason of affecting beryllium’s swelling was also discussed in Figure 8.

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