Research data to the manuscript "Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers", in: Scientific Reports 13:19086 (2023), DOI: 10.1038/s41598-023-46110-2
| Identifier | |
|---|---|
| DOI | https://doi.org/10.22000/1722 |
| Metadata Access | https://www.radar-service.eu/oai/OAIHandler?verb=GetRecord&metadataPrefix=datacite&identifier=10.22000/1722 |
| Provenance | |
|---|---|
| Creator | Weber, Heiko B.  ; Hochreiter, André |
| Publisher | Weber, Heiko,Hochreiter, André |
| Contributor | RADAR |
| Publication Year | 2023 |
| Funding Reference | Deutsche Forschungsgemeinschaft 501100001659 Crossref Funder ID 429529648 |
| Rights | Open Access; Creative Commons Attribution Non Commercial 4.0 International; info:eu-repo/semantics/openAccess; https://creativecommons.org/licenses/by-nc/4.0/legalcode |
| OpenAccess | true |
| Representation | |
|---|---|
| Resource Type | Dataset |
| Format | application/x-tar |
| Discipline | Natural Sciences; Physics |